[KongchangAI]
Unverified50% confidenceFactExact time

微型悬臂梁通过硅基MEMS工艺制造,尖端电子束沉积(EBD)可将针尖曲率半径控制在3-5纳米以内

1
Sources
50%
Confidence
Long-term
Relevance
7/6/2026
First Seen

Sources

Cite This Claim

Stable URI
https://kongchang.com/claim/114197
API
curl https://kongchang.com/api/v1/knowledge/claims/114197
MCP
get_claim(id=114197)