[KongchangAI]
Unverified50% confidenceFactExact time

EUV技术使用13.5纳米波长光源,相较传统DUV(193纳米)可在单次曝光实现更精细图案转移,是7nm以下先进制程量产的关键技术

1
Sources
50%
Confidence
Long-term
Relevance
7/24/2026
First Seen

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