Unverified50% confidenceFactExact time
MEMS gyroscopes use a vibrating scheme, in which a proof mass microfabricated from silicon vibrates at high frequency under the action of drive electrodes, and when rotating, the Coriolis force deflects the vibration direction, with the angular velocity calculated by detecting changes in capacitance.
1
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50%
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Long-term
Relevance
10/16/2026
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