Unverified50% confidenceFactExact time
High-NA EUV将数值孔径从0.33提升至0.55,理论分辨率提高约40%,全球目前仅ASML一家能制造,每台造价约3.5亿美元
1
Sources
50%
Confidence
Long-term
Relevance
7/21/2026
First Seen
Sources
Related Claims
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